15K Cryopump Array Kits

15K Cryopump Array Kits

Unlike turbo or diffusion vacuum pumps that are exhausted by a separate mechanical pump, gases pumped by a cryopump are captured within the pump. Occasionally the pumping surfaces will fill to capacity and require regeneration. Less frequently, the charcoal array will become contaminated and need to be replaced. Specialty Fluids 15K array replacement kits come with everything you need to successfully replace the charcoal array and get your pump back online quickly.

Array Kits are manufactured new and contain no rebuilt or refurbished material.

Showing all 6 results

  • 15K Charcoal Array
  • 15K Charcoal Array
  • Cryopump Repair Parts
  • Cryopump Repair Parts
  • Cryopump Repair Parts
  • Cryopump Repair Parts